中国科学院机构知识库网格系统: Imaging system effects on the measuring accuracy of the optical surface in interferometer (EI CONFERENCE)

中国科学院机构知识库网格

Chinese Academy of Sciences Institutional Repositories Grid

Imaging system effects on the measuring accuracy of the optical surface in interferometer (EI CONFERENCE)

文献类型：会议论文


作者	Yang W. ; Liu M. ; Xu W.
出版日期	2011
会议名称	3rd International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2011, January 6, 2011 - January 7, 2011
会议地点	Shanghai, China
关键词	In order to measure high accuracy or mid spatial frequency optical surfaces this study investigated imaging system in Fizeau interferometer. Interferometer is a transferring phase information system. General transfer function can't evaluate the ability of imaging system in interferometer that transfers the phase information of the optical surface. So this paper deduced instrument transfer function (ITF) and used ITF to evaluate the phase information transfer ability of interferometer. We obtained some results about ITF of imaging system by numerical simulation when there are different aberrations in imaging system or measuring optical surfaces were different. Our results indicate that ITF can evaluate the ability of transferring phase information in interferometer and the distortion of imaging system evidently affects the accuracy of interferometric measurements. 2010 IEEE.
页码	363-365
收录类别	EI
源URL	[http://ir.ciomp.ac.cn/handle/181722/33304]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Yang W.,Liu M.,Xu W.. Imaging system effects on the measuring accuracy of the optical surface in interferometer (EI CONFERENCE)[C]. 见:3rd International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2011, January 6, 2011 - January 7, 2011. Shanghai, China.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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