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Design and demonstration of micro multi-step mirrors and light source in micro FTIR (EI CONFERENCE)

文献类型：会议论文

作者Liang Z. ; Fu J. ; Feng C. ; Liang J.
出版日期2011
会议名称6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, February 20, 2011 - February 23, 2011
会议地点Kaohsiung, Taiwan
关键词To obtain high resolution high signal-to-noise ratio (SNR) high reliability and real time in wide spectral range we study the space modulation Micro Fourier Transform Spectrometer (FTS) based on multi-step mirrors covering the spectral range of 3-5m and 8-12 m in theory and experiment. The influences of spectrum reconstruction caused by the diffraction and extended light source in Fourier Transform Infrared Spectrometer (FTIR) are analyzed. A method to reduce the noises in spectrum reconstruction and the relationship between coherent intensity and solid angle of light source are discussed. An extended light source with suitable size is chosen considering the requirement of SNR and spectrum resolving power in the optical design. Furthermore the fabrication of micro multi-step mirrors which is the core part of FTS is investigated. Three methods for fabricating multi-step micro mirrors are demonstrated. 2011 IEEE.
页码433-436
收录类别EI
源URL[http://ir.ciomp.ac.cn/handle/181722/33373]  
专题长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式
GB/T 7714		 Liang Z.,Fu J.,Feng C.,et al. Design and demonstration of micro multi-step mirrors and light source in micro FTIR (EI CONFERENCE)[C]. 见:6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, February 20, 2011 - February 23, 2011. Kaohsiung, Taiwan.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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