Fabrication of ZnO thin film transistors based on the substrate of glass (EI CONFERENCE)
文献类型：会议论文
| 作者 | Tang W. ; Gao X.; Wang C.
|
| 出版日期 | 2010 |
| 会议名称 | 2009 International Symposium on Liquid Crystal Science and Technology, August 2, 2009 - August 5, 2009 |
| 会议地点 | Kunming, China |
| 关键词 | Abstract. In our paper we induced the process of ZnO based thin film transistors (ZnO-TFTs) fabricated on the substrate of glass. The photolithographic plate designed for using in the ZnO-TFT devices fabrication process was shown in our paper. The ZnO-TFT devices were fabricated successfully the Ion/off ratio is 104. (2010) Trans Tech Publications. |
| 页码 | 501-504 |
| 收录类别 | EI |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/33420]  |
| 专题 | 长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文 |
| 推荐引用方式 GB/T 7714 | Tang W.,Gao X.,Wang C.. Fabrication of ZnO thin film transistors based on the substrate of glass (EI CONFERENCE)[C]. 见:2009 International Symposium on Liquid Crystal Science and Technology, August 2, 2009 - August 5, 2009. Kunming, China. |
入库方式： OAI收割
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