The study of ZnO film growth and the fabrication of ZnO-based thin film transistors (EI CONFERENCE)
文献类型：会议论文
| 作者 | Wang C.
|
| 出版日期 | 2007 |
| 会议名称 | Asia Display 2007, AD'07, March 12, 2007 - March 16, 2007 |
| 会议地点 | Shanghai, China |
| 关键词 | The ZnO films were deposited on the substrate of glass by MOCVD [1-3]. The X-ray diffraction patterns of samples show sharp diffraction peaks ZnO (002) indicating the films were highly c-axis oriented. The devices based on the ZnO film were fabricated. |
| 页码 | 683-684 |
| 收录类别 | EI |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/33510]  |
| 专题 | 长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文 |
| 推荐引用方式 GB/T 7714 | Wang C.. The study of ZnO film growth and the fabrication of ZnO-based thin film transistors (EI CONFERENCE)[C]. 见:Asia Display 2007, AD'07, March 12, 2007 - March 16, 2007. Shanghai, China. |
入库方式： OAI收割
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