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Developing of in-suit long trance profiler for testing slope error of aspherical optical Elements (EI CONFERENCE)

文献类型：会议论文

作者Zhou C. ; Li H. ; Chen C. ; Zhou C. ; Qian S.
出版日期2005
会议名称ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005
会议地点Changchun, China
关键词Profile error of super smooth surface of optical elements at X-ray/EUV in synchrotron radiation (SR) light beam line is described as slope error of them generally. The Long Trace Profiler (LPT) is used for testing surface slope error of SR optical elements in world generally. It is requisite to use In-suit LTP measuring surface thermal distortion of SR optical elements with high heat under high bright SR source. Authors design an In-suit LTP by means of co-path interferometer with pencil light beam. The instrument not only can be used for testing slope error of mirrors in Lab. also in situation test the distortion of mirror with high heat load at synchrotron light beam line. The device can be used to test various absolute surface figures of optical elements such as aspherieal spherical and plane. It is needless standard reference surface. It is named by LTP-III. This paper describes its basic operating principle optical system mechanical constructions DC serve motor control system array detector data acquisition system and computer system for controlling and data analysis of LTP-III. The Instrument has advantages of high accuracy low cost multifunction and wide application. Length of surface measured of optical element accuracy is 0.04 arcsec.
收录类别EI
源URL[http://ir.ciomp.ac.cn/handle/181722/33600]  
专题长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式
GB/T 7714		 Zhou C.,Li H.,Chen C.,et al. Developing of in-suit long trance profiler for testing slope error of aspherical optical Elements (EI CONFERENCE)[C]. 见:ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005. Changchun, China.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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