中国科学院机构知识库网格系统: Study on LD-pumped Nd:YAG laser cutter (EI CONFERENCE)

中国科学院机构知识库网格

Chinese Academy of Sciences Institutional Repositories Grid

Study on LD-pumped Nd:YAG laser cutter (EI CONFERENCE)

文献类型：会议论文


作者	Zhang G.; Zhang G.; Zhang G.; Zhang J.; Zhang J.; Zhang J.; Zhao J.
出版日期	2005
会议名称	ICO20: Lasers and Laser Technologies, August 21, 2005 - August 26, 2005
会议地点	Changchun, China
关键词	The theory of laser cutter and the technology neck is analyzed. We can conclude that it is almost impossible to deal with the waste thick silicon wafers which are yielded in producing silicon wafers by conventional eroding or diamond cutting when the cutting velocity equals 100mm/min while it is also unperfected with ecumenical laser cutter without good beam quality or precise laseroptics system. It is represented that high average power and high repetition rate laser with good beam quality and precise laseroptics system are pivotal to obtain excellent cutting effect such as thick groove depth double-layer 0.75mm thick silicon wafer can be penetrated.. The cross section is fine and the groove is narrow rapid cutting speed the cutting quality meets the expecting demand. fine kerf section without considering the effect of technique. Considering laser medium thermal lens effect and thermal focal length changing with pumping power using plano-convex high reflectivity mirror as the back cavity mirror to compensate the heat lens influence a /4 waveplate to compensate heat -induced birefraction utilize the Nd:YAG self- aperture effect more than 50 W average power 1.064 um IR output is obtained with beam quality factor (M2) equals 3.19. Through the LD-Pumped Nd:YAG laser cutter we developed with short focus length negative spherical aberration focusing lens double axis linear step motor positioning system suitable beam expander multiplying factor appropriate diameter of exit beam aperture proper repetition rate when the cutting velocity equals 400mm/min 0.75mm thick silicon wafer can be penetrated
收录类别	EI
源URL	[http://ir.ciomp.ac.cn/handle/181722/33617]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Zhang G.,Zhang G.,Zhang G.,et al. Study on LD-pumped Nd:YAG laser cutter (EI CONFERENCE)[C]. 见:ICO20: Lasers and Laser Technologies, August 21, 2005 - August 26, 2005. Changchun, China.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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