中国科学院机构知识库网格系统: IAD-Si coatings on RB-SiC space mirrors for ultra-smooth surfaces (EI CONFERENCE)

中国科学院机构知识库网格

Chinese Academy of Sciences Institutional Repositories Grid

IAD-Si coatings on RB-SiC space mirrors for ultra-smooth surfaces (EI CONFERENCE)

文献类型：会议论文


作者	Xu L.; Wang X.; Wang X.; Wang X.; Zhang F.; Zhang F.; Zhang X.; Zhang X.; Zhang X.
出版日期	2009
会议名称	4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, November 19, 2008 - November 21, 2008
会议地点	Chengdu, China
关键词	To eliminate surface limitation caused by Silicon impurity in RB-SiC space mirrors a relatively thick Si film is deposited on well finished RB-SiC substrate by a new process-ion assisted depositing (IAD) to provide a better polishable surface. Testing results of IAD-Si properties are provided showing that the amorphous film has great thermal shock resistance. Then polishing experiments on 100.5m thick IAD-Si layers are accomplished focusing on smoother surface. Surface figure and micro-roughness of the coating after polished reach 0.026 RMS (=0.6328nm) and less than 0.5nm RMS respectively. Moreover reflectivity of IAD-Si polished surface with reflective films increases higher than 4.5% than that of RB-SiC in 360-1100nm. High reflectivity and desirable thermal property make IAD-Si an attractive coating material for RB-SiC space mirrors. 2009 SPIE.
收录类别	EI
源URL	[http://ir.ciomp.ac.cn/handle/181722/33844]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Xu L.,Wang X.,Wang X.,et al. IAD-Si coatings on RB-SiC space mirrors for ultra-smooth surfaces (EI CONFERENCE)[C]. 见:4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, November 19, 2008 - November 21, 2008. Chengdu, China.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

浏览0

下载0

收藏0

其他版本

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。