中国科学院机构知识库网格系统: Influence of spatial temperature distribution on high accuracy interferometric metrology (EI CONFERENCE)

中国科学院机构知识库网格

Chinese Academy of Sciences Institutional Repositories Grid

Influence of spatial temperature distribution on high accuracy interferometric metrology (EI CONFERENCE)

文献类型：会议论文


作者	Yang H.; Zhang J.; Zhang J.; Zhang J.; Yan F.; Yan F.
出版日期	2010
会议名称	5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, April 26, 2010 - April 29, 2010
会议地点	Dalian, China
关键词	We calculate the influence of temperature change on the refractive index of air establish a model of air temperature distribution and analyze the effect of different temperature distribution on the high accuracy interferometric metrology. First a revised Edlen formula is employed to acquire the relation between temperature and refractive index of air followed by introducing the fixed temperature gradient distribution among the spatial grid within the optical cavity between the reference flat and the test flat of the Fizeau interferometer accompanied by a temperature change random function within each grid. Finally all the rays through the air layer with different incident angles are traced by Matlab program in order to obtain the final output position angle and OPD for each ray. The influence of different temperature distribution and the length of the optical cavity in on the testing accuracy can be analyzed through the RMS value that results from repeatable rays tracing. As a result the horizontal distribution (vertical to optical axis) has a large effect on the testing accuracy. Thus to realize the high accuracy figure metrology the horizontal distribution of temperature must be rigorously controlled as well as to shorten the length of the optical cavity to a large extent. The results from our simulation are of great significant for the accuracy analysis of interferometric testing and the research of manufacturing a interferometer. 2010 Copyright SPIE - The International Society for Optical Engineering.
收录类别	EI
源URL	[http://ir.ciomp.ac.cn/handle/181722/33872]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Yang H.,Zhang J.,Zhang J.,et al. Influence of spatial temperature distribution on high accuracy interferometric metrology (EI CONFERENCE)[C]. 见:5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, April 26, 2010 - April 29, 2010. Dalian, China.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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