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Research of active supporting technology based on 400mm thin mirror (EI CONFERENCE)

文献类型：会议论文

作者Liu X.-Y.; Wang J.-L.; Wang J.-L.; Liu X.-Y.
出版日期2010
会议名称5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, April 26, 2010 - April 29, 2010
会议地点Dalian, China
关键词Using a spherical mirror of 400mm diameter and 12mm thickness active supporting technology of thin mirror is researched. The axial support of the mirror is composed of 12 active supports and 3 fixed supports. The force actuator which is composed of displacement actuator and force sensor is installed in the active support. The mirror surface is tested by Zygo interferometer. For calibration each actuator exerts unit force alone and the surface variation is tested and taken as the response function of the actuator. The response functions of all actuators compose the stiffness matrix. Then the stiffness matrix is used by damped least square method to determine the correction force of each active support. In order to analyze the correction capability of the active supports 14 Zernike modes of the mirror surface are generated and tested respectively and 7 modes are selected for correction. Initially the RMS error of mirror surface is 1.16 I( =0.6328nm)when all actuators exert the same force. After 5 iterations the RMS error of mirror surface is reduced to 0.13 close to the original surface quality. 2010 Copyright SPIE - The International Society for Optical Engineering.
收录类别EI
源URL[http://ir.ciomp.ac.cn/handle/181722/33882]  
专题长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式
GB/T 7714		 Liu X.-Y.,Wang J.-L.,Wang J.-L.,et al. Research of active supporting technology based on 400mm thin mirror (EI CONFERENCE)[C]. 见:5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, April 26, 2010 - April 29, 2010. Dalian, China.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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