中国科学院机构知识库网格系统: Research on automatic Hartmann test of membrane mirror (EI CONFERENCE)

中国科学院机构知识库网格

Chinese Academy of Sciences Institutional Repositories Grid

Research on automatic Hartmann test of membrane mirror (EI CONFERENCE)

文献类型：会议论文


作者	Zhang P.
出版日期	2010
会议名称	5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, April 26, 2010 - April 29, 2010
会议地点	Dalian, China
关键词	Electrostatic membrane mirror is ultra-lightweight and easy to acquire a large diameter comparing with traditional optical elements so its development and usage is the trend of future large mirrors. In order to research the control method of the static stretching membrane mirror the surface configuration must be tested. However membrane mirror's shape is always changed by variable voltages on the electrodes and the optical properties of membrane materials using in our experiment are poor so it is difficult to test membrane mirror by interferometer and null compensator method. To solve this problem an automatic optical test procedure for membrane mirror is designed based on Hartmann screen method. The optical path includes point light source CCD camera splitter and diffuse transmittance screen. The spots' positions on the diffuse transmittance screen are pictured by CCD camera connected with computer and image segmentation and centroid solving is auto processed. The CCD camera's lens distortion is measured and fixing coefficients are given to eliminate the spots' positions recording error caused by lens distortion. To process the low sampling Hartmann test results Zernike polynomial fitting method is applied to smooth the wave front. So low frequency error of the membrane mirror can be measured then. Errors affecting the test accuracy are also analyzed in this paper. The method proposed in this paper provides a reference for surface shape detection in membrane mirror research. 2010 Copyright SPIE - The International Society for Optical Engineering.
收录类别	EI
源URL	[http://ir.ciomp.ac.cn/handle/181722/33883]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Zhang P.. Research on automatic Hartmann test of membrane mirror (EI CONFERENCE)[C]. 见:5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, April 26, 2010 - April 29, 2010. Dalian, China.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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