中国科学院机构知识库网格系统: Study on annular polishing for a rectangle optical flat with high aspect ratio (EI CONFERENCE)

中国科学院机构知识库网格

Chinese Academy of Sciences Institutional Repositories Grid

Study on annular polishing for a rectangle optical flat with high aspect ratio (EI CONFERENCE)

文献类型：会议论文


作者	Li J.; Li J.; Li J.
出版日期	2010
会议名称	5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, April 26, 2010 - April 29, 2010
会议地点	Dalian, China
关键词	The annular polishing is used to manufacture a rectangle optical flat with high aspect ratio in this paper. To control the polishing conveniently a theoretical model based on the Preston hypothesis is given. According to the model the problems related to control the power and the edge effect occurred during the process are analyzed and practically solved. Finally the surface PV of 60 nm was achieved. 2010 Copyright SPIE - The International Society for Optical Engineering.
收录类别	EI
源URL	[http://ir.ciomp.ac.cn/handle/181722/33888]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Li J.,Li J.,Li J.. Study on annular polishing for a rectangle optical flat with high aspect ratio (EI CONFERENCE)[C]. 见:5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, April 26, 2010 - April 29, 2010. Dalian, China.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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