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Temperature gradients effect on surface test with high precise interferometer (EI CONFERENCE)

文献类型：会议论文

作者Gu Y.-Q.; Yang H.-J.; Sui Y.-X.; Zhang J.; Zhang J.; Zhang J.; Miao E.-L.
出版日期2010
会议名称5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, April 26, 2010 - April 29, 2010
会议地点Dalian, China
关键词In high precise surface testing temperature stability and uniformity are of paramount importance to the high accuracy of test results. Micro-temperature variation and temperature gradients not only cause the change of the air refractive index and lead to the optical path variation in interferometer cavity but also result in deformation of the tested surface itself which always brings about errors to the test results. Temperature effects on the interferometer cavity and the tested surface are analyzed from the axial and radial directions in this letter. Temperature model of the interferometer cavity and the tested lens are established and quantitative calculations and diagram of test results versus temperature and lens dimension are provided. It shows that temperature gradients effect increase with the length of the interferometer and the dimension of the tested lens. The interferometer cavity is mainly affected by radial temperature gradients while the tested lens is mainly affected by the axial temperature gradients. 2010 Copyright SPIE - The International Society for Optical Engineering.
收录类别EI
源URL[http://ir.ciomp.ac.cn/handle/181722/33891]  
专题长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式
GB/T 7714		 Gu Y.-Q.,Yang H.-J.,Sui Y.-X.,et al. Temperature gradients effect on surface test with high precise interferometer (EI CONFERENCE)[C]. 见:5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, April 26, 2010 - April 29, 2010. Dalian, China.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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