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Determination of optical constants of zirconia and silica thin films in UV to visible range (EI CONFERENCE)

文献类型：会议论文

作者Liu L.; Yang H.; Liu L.
出版日期2007
会议名称3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Advanced Optical Manufacturing Technologies, July 8, 2007 - July 12, 2007
会议地点Chengdu, China
关键词A curve fitting method for determining the optical constants of some dielectric thin films is described with dispersion theory in the paper. A computer program based on Matlab is developed and optimized. The fitting errors are analyzed with theoretical data which gives very high accurate results. A program is applied to fitting the measured photometric spectra of ion sputtered zirconia and silica thin films in 200-850nm spectra range. The thickness is verified with the method of grazing x-ray diffraction. With the thickness known the optical constants of zirconia films near the absorption range are obtained with single-wavelength method. As a result quite good fitting results are obtained with high accuracy. Finally an ultraviolet (UV) high-pass optical filter is designed with optical constants extracted by this method. The transmission and reflection spectra of the filter are measured and compared to designed spectra. A good coherence was derived.
收录类别EI
源URL[http://ir.ciomp.ac.cn/handle/181722/33897]  
专题长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式
GB/T 7714		 Liu L.,Yang H.,Liu L.. Determination of optical constants of zirconia and silica thin films in UV to visible range (EI CONFERENCE)[C]. 见:3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Advanced Optical Manufacturing Technologies, July 8, 2007 - July 12, 2007. Chengdu, China.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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