中国科学院机构知识库网格系统: Fabrication of multilayer laminar grating with high efficiency for extreme ultraviolet (EI CONFERENCE)

中国科学院机构知识库网格

Chinese Academy of Sciences Institutional Repositories Grid

Fabrication of multilayer laminar grating with high efficiency for extreme ultraviolet (EI CONFERENCE)

文献类型：会议论文


作者	Jin C.-S.; Zhang L.-C.
出版日期	2007
会议名称	3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Advanced Optical Manufacturing Technologies, July 8, 2007 - July 12, 2007
会议地点	Chengdu, China
关键词	The main goal for investigations on multilayer laminar gratings working at the EUV region is to enhance their efficiency. In this article second third we demonstrate a routine to fabricate multilayer laminar gratings with high efficiency. This routine comprises three steps: first optimizing fabricating techniques to obtain multilayer coatings with high reflectivity strictly controlling errors of multilayer grating parameters to ensure the coinciding of the optical performance with the expectation. Results demonstrate that this routine is feasible. The measured peak efficiency of -1 order at 12.8nm was 14.3%. Some related issues about efficiency curves such as wavelength separation and suppression of zero order are discussed. preparing grating substrates with ideal groove profile and low roughness by holographic recording and ion beam etching process
收录类别	EI
源URL	[http://ir.ciomp.ac.cn/handle/181722/33899]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Jin C.-S.,Zhang L.-C.. Fabrication of multilayer laminar grating with high efficiency for extreme ultraviolet (EI CONFERENCE)[C]. 见:3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Advanced Optical Manufacturing Technologies, July 8, 2007 - July 12, 2007. Chengdu, China.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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