中国科学院机构知识库网格系统: Key techniques of laser direct writing patterns on spherical substrate (EI CONFERENCE)

中国科学院机构知识库网格

Chinese Academy of Sciences Institutional Repositories Grid

Key techniques of laser direct writing patterns on spherical substrate (EI CONFERENCE)

文献类型：会议论文


作者	Zhao J.-L.; Feng X.-G.
出版日期	2007
会议名称	3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007
会议地点	Chengdu, China
关键词	Comparing with the writing method of plane pattern spherical pattern' has some remarkable different on several points. Firstly it is difficult to spin-coated a uniform photoresist film on a spherical substrate especially the ratio of spherical radius to caliber is smaller and the spin-coated way must match the ratio of spherical radius to caliber. Secondly if the sphere couldn't be regarded as a plane a so-called concentric optical scan movement way must be applied for the generation of spherical pattern because the reflex of substrate will affect the quantity of illumination. Commonly an alignment technique is indispensable with pattern generation of spherical surface by the concentric optical scan in order to ensure the orthogonal intersection of focusing laser beam and writing surface. Thirdly a uniform velocity control must be considered for the laser direct writing method on a spherical substrate. Otherwise the exposure time of photoresist will be different and the line widths of pattern will be also different at different areas. Fourthly commonly because the errors of concentric machine and substrate surface shape are bigger so focusing servo-control technique is also needful for writing a pattern on a spherical substrate. Focusing servo-control may keep the focal spot on the spherical surface by a focus detection and control system in the course of writing pattern. Using these techniques we fabricated a line width of 7m and a period of 600m isometric mesh on the concave of a spherical substrate.
收录类别	EI
源URL	[http://ir.ciomp.ac.cn/handle/181722/33901]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Zhao J.-L.,Feng X.-G.. Key techniques of laser direct writing patterns on spherical substrate (EI CONFERENCE)[C]. 见:3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007. Chengdu, China.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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