中国科学院机构知识库网格系统: 1D-KBA microscope using double-periodic multilayer (EI CONFERENCE)

中国科学院机构知识库网格

Chinese Academy of Sciences Institutional Repositories Grid

1D-KBA microscope using double-periodic multilayer (EI CONFERENCE)

文献类型：会议论文


作者	Wang Z.; Wang X.; Wang X.; Wang X.; Wang Z.
出版日期	2009
会议名称	Advances in X-Ray/EUV Optics and Components IV, August 3, 2009 - August 5, 2009
会议地点	San Diego, CA, United states
关键词	To study the action of shock wave in CH target one-dimensional grazing incidence KBA microscope for 4.75keV energy was set up. Because of strong absorption in air 4.75keV energy microscope can just work in vacuum. Accordingly the alignment and assemblage will be very complicated and difficult. A special multilayer method using double periodic multilayer was proposed to solve this problem. This multilayer has high reflectivity not only for 4.75keV X-rays but also for 8keV X-rays at the same grazing incidence angle. It means 1D-KBA microscope has the same light trace for different working energies. Therefore we can implement the alignment and assembly of 4.75keV system by the help of 8keV X-rays. Because 8keV X-rays is very easy produced by X-ray tube and has strong transmittability in air the alignment and assemblage process became relatively easy. By now we have finished the alignment experiment at 8keV and obtained imaging results. The performance is about 2-3m resolution in 250m field of view. It is coincide with the calculation. 2009 SPIE.
收录类别	EI
源URL	[http://ir.ciomp.ac.cn/handle/181722/33919]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Wang Z.,Wang X.,Wang X.,et al. 1D-KBA microscope using double-periodic multilayer (EI CONFERENCE)[C]. 见:Advances in X-Ray/EUV Optics and Components IV, August 3, 2009 - August 5, 2009. San Diego, CA, United states.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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