中国科学院机构知识库网格系统: Manufacturing and testing of the line-array fiber-optic image slicer based on silicon V-grooves (EI CONFERENCE)

中国科学院机构知识库网格

Chinese Academy of Sciences Institutional Repositories Grid

Manufacturing and testing of the line-array fiber-optic image slicer based on silicon V-grooves (EI CONFERENCE)

文献类型：会议论文


作者	Zhu Y.
出版日期	2008
会议名称	MEMS/MOEMS Technologies and Applications III, November 12, 2007 - November 14, 2007
会议地点	Beijing, China
关键词	Linear fiber-optic image slicer is used more and more in spatial exploration and imaging system. In this paper a plane arranging method of fiber-optic array based on Si-V grooves is established in order to improve the accuracy and reduce the cost of manufacturing. Firstly the Si-V groove array is micro-machined with anisotropic etching process then optical fibers are placed in the grooves orderly with plane arranging method. Secondly the end surfaces of the device are polished also the linear fiber-optic image slicer is packaged. Finally some parameters are tested including structure parameters transmittivity and vibration test. Experimental results indicate that the maximum error accumulated in 2000 periods of the Si-V grooves is 0.5 m the error of the height in Si-V grooves is less than 0.15m the roughness of the end surface is less than 0.9nm. The transmittivity of the linear fiber-optic image slicer that without optical film is 51.46% at the wavelength of 632.8nm. After random vibration experiment the ratio of the broken fiber increased by 0.1%. While the temperature reached 320C the stress of epoxy will be 130Mpa which is close to the limit resistance stress of 139Mpa some cracks appeared.
收录类别	EI
源URL	[http://ir.ciomp.ac.cn/handle/181722/33925]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Zhu Y.. Manufacturing and testing of the line-array fiber-optic image slicer based on silicon V-grooves (EI CONFERENCE)[C]. 见:MEMS/MOEMS Technologies and Applications III, November 12, 2007 - November 14, 2007. Beijing, China.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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