Wafer-Level Testable High-Speed Silicon Microring Modulator Integrated with Grating Couplers
文献类型：期刊论文
| 作者 | Xiao X (Xiao Xi) ; Zhu Y (Zhu Yu) ; Xu HH (Xu Hai-Hua) ; Zhou LA (Zhou Liang) ; Hu YT (Hu Ying-Tao) ; Li ZY (Li Zhi-Yong) ; Li YT (Li Yun-Tao) ; Yu YD (Yu Yu-De) ; Yu JZ (Yu Jin-Zhong) |
| 刊名 | chinese physics letters
 |
| 出版日期 | 2010 |
| 卷号 | 27期号:9页码:art. no. 094207 |
| 关键词 | CMOS SOI TECHNOLOGY WAVE-GUIDES PHOTONICS |
| 通讯作者 | xiao, x, chinese acad sci, inst semicond, state key lab integrated optoelect, pob 912, beijing 100083, peoples r china. e-mail address: yudeyu@semi.ac.cn ; jzyu@semi.ac.cn |
| 合作状况 | 其它 |
| 中文摘要 | a wafer-level testable silicon-on-insulator-based microring modulator is demonstrated with high modulation speed, to which the grating couplers are integrated as the fiber-to-chip interfaces. cost-efficient fabrications are realized with the help of optical structure and etching depth designs. grating couplers and waveguides are patterned and etched together with the same slab thickness. finally we obtain a 3-db coupling bandwidth of about 60nm and 10 gb/s nonreturn-to-zero modulation by wafer-level optical and electrical measurements. |
| 英文摘要 | a wafer-level testable silicon-on-insulator-based microring modulator is demonstrated with high modulation speed, to which the grating couplers are integrated as the fiber-to-chip interfaces. cost-efficient fabrications are realized with the help of optical structure and etching depth designs. grating couplers and waveguides are patterned and etched together with the same slab thickness. finally we obtain a 3-db coupling bandwidth of about 60nm and 10 gb/s nonreturn-to-zero modulation by wafer-level optical and electrical measurements.; submitted by 阎军 (yanj@red.semi.ac.cn) on 2010-10-11t02:42:34z no. of bitstreams: 1 wafer-level testable high-speed silicon microring modulator integrated with grating couplers.pdf: 1234751 bytes, checksum: 56670b6ebe0a0bcad98b0359f89573df (md5); approved for entry into archive by 阎军(yanj@red.semi.ac.cn) on 2010-10-11t03:10:10z (gmt) no. of bitstreams: 1 wafer-level testable high-speed silicon microring modulator integrated with grating couplers.pdf: 1234751 bytes, checksum: 56670b6ebe0a0bcad98b0359f89573df (md5); made available in dspace on 2010-10-11t03:10:10z (gmt). no. of bitstreams: 1 wafer-level testable high-speed silicon microring modulator integrated with grating couplers.pdf: 1234751 bytes, checksum: 56670b6ebe0a0bcad98b0359f89573df (md5) previous issue date: 2010; supported by the state key development program for basic research of china under grant no 2006cb302803, and the national natural science foundation of china under grant no 60877036; 其它 |
| 学科主题 | 光电子学 |
| 收录类别 | SCI |
| 资助信息 | supported by the state key development program for basic research of china under grant no 2006cb302803, and the national natural science foundation of china under grant no 60877036 |
| 语种 | 英语 |
| 公开日期 | 2010-10-11 ; 2010-10-15 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/13540]  |
| 专题 | 半导体研究所_集成光电子学国家重点实验室 |
| 推荐引用方式 GB/T 7714 | Xiao X ,Zhu Y ,Xu HH ,et al. Wafer-Level Testable High-Speed Silicon Microring Modulator Integrated with Grating Couplers[J]. chinese physics letters,2010,27(9):art. no. 094207. |
| APA | Xiao X .,Zhu Y .,Xu HH .,Zhou LA .,Hu YT .,...&Yu JZ .(2010).Wafer-Level Testable High-Speed Silicon Microring Modulator Integrated with Grating Couplers.chinese physics letters,27(9),art. no. 094207. |
| MLA | Xiao X ,et al."Wafer-Level Testable High-Speed Silicon Microring Modulator Integrated with Grating Couplers".chinese physics letters 27.9(2010):art. no. 094207. |
入库方式： OAI收割
来源：半导体研究所
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