中国科学院机构知识库网格系统: Analysis of measuring errors for the visible light phase-shifting point diffraction interferometer (EI CONFERENCE)

中国科学院机构知识库网格

Chinese Academy of Sciences Institutional Repositories Grid

Analysis of measuring errors for the visible light phase-shifting point diffraction interferometer (EI CONFERENCE)

文献类型：会议论文


作者	Zhang Y.
出版日期	2010
会议名称	2010 OSA-IEEE-COS Advances in Optoelectronics and Micro/Nano-Optics, AOM 2010, December 3, 2010 - December 6, 2010
会议地点	Guangzhou, China
关键词	In order to improve the measuring accuracy of the visible light phase-shifting point diffraction interferometer (PS/PDI) for the extreme ultraviolet lithography (EUVL) aspheric mirrors the main measuring errors will be discussed in this paper. At first the elementary configuration and measuring principle of the visible light phase-shifting point diffraction interferometer are introduced briefly then the different errors which are possible to affect the measuring result are summed up the errors include PZT phase-shifting error detector nonlinearity error detector quantization error wavelength instability error and intensity instability error of the laser source vibration error air refractivity instability error and so on. Through detailed analysis and simulation the magnitude of these errors can be obtained. By analysing the reasons which cause these errors and the relationship between these errors and interferometer configuration parameters some methods are put forward to avoid or restrain these errors accordingly.
收录类别	EI
源URL	[http://ir.ciomp.ac.cn/handle/181722/34040]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Zhang Y.. Analysis of measuring errors for the visible light phase-shifting point diffraction interferometer (EI CONFERENCE)[C]. 见:2010 OSA-IEEE-COS Advances in Optoelectronics and Micro/Nano-Optics, AOM 2010, December 3, 2010 - December 6, 2010. Guangzhou, China.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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