A nanometer scale alignment method of concentric spherical mirrors based on interferometry (EI CONFERENCE)
文献类型：会议论文
| 作者 | Xu T.
|
| 出版日期 | 2011 |
| 会议名称 | 4th IEEE International Nanoelectronics Conference, INEC 2011, June 21, 2011 - June 24, 2011 |
| 会议地点 | Tao-Yuan, Taiwan |
| 关键词 | A nanometer scale alignment method of spherical concentric mirrors based on dual-beam interferometry is proposed which is also the method to measure the defocus of concentric spherical mirrors. In the process of aligning the concentric spherical mirrors the defocus can be measured real time with nanometer scale error. The experimental result shows that the method can achieve the defocus of the spherical concentric mirrors several nanometers. 2011 IEEE. |
| 收录类别 | EI |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/34047]  |
| 专题 | 长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文 |
| 推荐引用方式 GB/T 7714 | Xu T.. A nanometer scale alignment method of concentric spherical mirrors based on interferometry (EI CONFERENCE)[C]. 见:4th IEEE International Nanoelectronics Conference, INEC 2011, June 21, 2011 - June 24, 2011. Tao-Yuan, Taiwan. |
入库方式： OAI收割
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