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Modelling of the electric field assisted capillarity effect used for the fabrication of hollow polymer microstructures (EI CONFERENCE)

文献类型：会议论文

作者Tonry C. ; Patel M. ; Bailey C. ; Desmuliez M. P. Y. ; Cargill S. ; Yu W.
出版日期2012
会议名称2012 13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2012, April 16, 2012 - April 18, 2012
会议地点Cascais, Portugal
关键词Electric Field Assisted Capillarity (EFAC) is a novel process which has the potential for the single step fabrication of hollow polymer microstructures. The process has been shown to work experimentally on a microscale level using Polydimethylsiloxane (PDMS). The process makes use of both the electrohydrodynamics of polymer at a microscale and the voltage enhanced capillary force exerted on the polymer. This paper discusses the results of a two-dimensional numerical simulation of this process. The results presented use a patterned master electrode producing encapsulated microchannels in the polymer. The simulations demonstrate how the differing contact angles between the polymer and the walls of the master electrode affect the thickness of the top surface of the formed microstructures. It also specifies the conditions necessary for the successful fabrication of such microstructures. 2012 IEEE.
收录类别EI
源URL[http://ir.ciomp.ac.cn/handle/181722/34051]  
专题长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式
GB/T 7714		 Tonry C.,Patel M.,Bailey C.,et al. Modelling of the electric field assisted capillarity effect used for the fabrication of hollow polymer microstructures (EI CONFERENCE)[C]. 见:2012 13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2012, April 16, 2012 - April 18, 2012. Cascais, Portugal.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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