Fabrication of nanopatterns on H-passivated Si surface by AFM local anodic oxidation
文献类型：期刊论文
| 作者 | Mo YF(莫宇飞) ; Wang Y(王莹) ; Bai MW(白明武) |
| 刊名 | Physica E
 |
| 出版日期 | 2008 |
| 卷号 | 41页码:146-149 |
| 关键词 | Nanopattern Local anodic oxidation Atomic force microscopy Pulse bias voltage |
| ISSN号 | 1386-9477 |
| 通讯作者 | 白明武 |
| 中文摘要 | Nano-sized patterns resulted from localized electrochemical oxidation by using atomic force microscopy (AFM) were fabricated on H-passivated Si surface. In this paper, the fabrication of nanopattern by local anodic oxidation (LAO) on H-passivated Si surface is presented. A special attention is paid to finding relations between the size of oxide nanopatterns and operational parameters such as tip-sample pulsed bias voltage, pulsewidth and relative humidity to fabricate oxide nanopattern. The LAO process shows the highly potential of solution processes for fabricating nano/micro-devices constructed from semiconductor materials for visible-light-emitting devices. |
| 学科主题 | 材料科学与物理化学 |
| 收录类别 | SCI |
| 资助信息 | the Innovative Group Foundation from National Natural Science Foundation of China (NSFC) under Grant number 20773148;NSFC 50675217;National 973 Program 2007CB607601 |
| 语种 | 英语 |
| WOS记录号 | WOS:000260283000031 |
| 公开日期 | 2013-03-28 |
| 源URL | [http://210.77.64.217/handle/362003/2686]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
| 推荐引用方式 GB/T 7714 | Mo YF,Wang Y,Bai MW. Fabrication of nanopatterns on H-passivated Si surface by AFM local anodic oxidation[J]. Physica E,2008,41:146-149. |
| APA | 莫宇飞,王莹,&白明武.(2008).Fabrication of nanopatterns on H-passivated Si surface by AFM local anodic oxidation.Physica E,41,146-149. |
| MLA | 莫宇飞,et al."Fabrication of nanopatterns on H-passivated Si surface by AFM local anodic oxidation".Physica E 41(2008):146-149. |
入库方式： OAI收割
来源：兰州化学物理研究所
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