Monte Carlo modeling of electron beam physical vapor deposition of yttrium
文献类型:期刊论文
作者 | Fan J(樊菁); Boyd ID; Shelton C |
刊名 | Journal of Vacuum Science & Technology A |
出版日期 | 2000 |
卷号 | 18期号:6页码:2937-2945 |
ISSN号 | 0022-5355 |
中文摘要 | As part of a study on the deposition of superconducting films of YBa2Cu3O7−δ, a three-dimensional electron beam physical vapor deposition process of yttrium in a vacuum chamber is investigated both computationally and experimentally. The numerical analysis employs the direct simulation Monte Carlo (DSMC) method. The experimental studies consist of atomic absorption spectra taken in the evaporated yttrium plume and deposited film thickness profiles. Some important modeling issues such as atomic collision cross sections for metal vapors and hyperfine electronic structure of the atomic absorption spectra are addressed. Film deposition thicknesses on the substrate and atomic absorption spectra given by the DSMC method and experiment are in excellent agreement. Collisions between the atoms are found to have a significant effect on the film growth rate and area of uniform deposition as the evaporation rate of yttrium increases. © 2000 American Vacuum Society. |
学科主题 | 流体力学 |
类目[WOS] | Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering ; Mining & Mineral Processing |
研究领域[WOS] | Materials Science ; Metallurgy & Metallurgical Engineering ; Mining & Mineral Processing |
收录类别 | SCI |
原文出处 | http://dx.doi.org/10.1116/1.1310656 |
语种 | 英语 |
WOS记录号 | WOS:000165388500043 |
公开日期 | 2013-04-23 |
源URL | [http://dspace.imech.ac.cn/handle/311007/47175] |
专题 | 力学研究所_力学所知识产出(1956-2008) |
推荐引用方式 GB/T 7714 | Fan J,Boyd ID,Shelton C. Monte Carlo modeling of electron beam physical vapor deposition of yttrium[J]. Journal of Vacuum Science & Technology A,2000,18(6):2937-2945. |
APA | 樊菁,Boyd ID,&Shelton C.(2000).Monte Carlo modeling of electron beam physical vapor deposition of yttrium.Journal of Vacuum Science & Technology A,18(6),2937-2945. |
MLA | 樊菁,et al."Monte Carlo modeling of electron beam physical vapor deposition of yttrium".Journal of Vacuum Science & Technology A 18.6(2000):2937-2945. |
入库方式: OAI收割
来源:力学研究所
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