Chemical Mechanical Polishing of Ge2Sb2Te5 Using Abrasive-Free Solutions of Iron Trichloride
文献类型：期刊论文
| 作者 | Yan, WX ; Wang, LY ; Zhang, ZF ; He, AD ; Zhong, M ; Liu, WL ; Wu, LC ; Song, ZT |
| 刊名 | CHINESE PHYSICS LETTERS
 |
| 出版日期 | 2012 |
| 卷号 | 29期号:3页码:38301 |
| ISSN号 | 0256-307X |
| 通讯作者 | Yan, WX (reprint author), Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Lab Nanotechnol, Shanghai 200050, Peoples R China. |
| 中文摘要 | Chemical mechanical polishing (CMP) of amorphous Ge2Sb2Te5 (GST) is studied using aqueous solutions of iron trichloride (FeCl3) as possible abrasive-free slurries. The polishing performance of abrasive-free solutions is compared with abrasive-containing ( |
| 学科主题 | Physics |
| 收录类别 | 2012SCI-169 |
| 原文出处 | 10.1088/0256-307X/29/3/038301 |
| 语种 | 英语 |
| 公开日期 | 2013-04-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/114748]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Yan, WX,Wang, LY,Zhang, ZF,et al. Chemical Mechanical Polishing of Ge2Sb2Te5 Using Abrasive-Free Solutions of Iron Trichloride[J]. CHINESE PHYSICS LETTERS,2012,29(3):38301. |
| APA | Yan, WX.,Wang, LY.,Zhang, ZF.,He, AD.,Zhong, M.,...&Song, ZT.(2012).Chemical Mechanical Polishing of Ge2Sb2Te5 Using Abrasive-Free Solutions of Iron Trichloride.CHINESE PHYSICS LETTERS,29(3),38301. |
| MLA | Yan, WX,et al."Chemical Mechanical Polishing of Ge2Sb2Te5 Using Abrasive-Free Solutions of Iron Trichloride".CHINESE PHYSICS LETTERS 29.3(2012):38301. |
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