Poly-Silicon Grating Couplers for Efficient Coupling With Optical Fibers
文献类型：期刊论文
| 作者 | Qiu, C ; Sheng, Z ; Li, L ; Pang, A ; Wang, ZQ ; Wu, AM ; Wang, X ; Zou, SC ; Gan, FW |
| 刊名 | IEEE PHOTONICS TECHNOLOGY LETTERS
 |
| 出版日期 | 2012 |
| 卷号 | 24期号:18页码:1614-1617 |
| 关键词 | Complementary metal-oxide-semiconductor (CMOS) technology silicon-on-insulator (SOI) waveguide silicon photonics waveguide grating coupler |
| ISSN号 | 1041-1135 |
| 通讯作者 | Qiu, C (reprint author), Chinese Acad Sci, State Key Lab Funct Mat Informat, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China. |
| 中文摘要 | Waveguide grating couplers based on complementary metal-oxide-semiconductor (CMOS) poly-silicon gate layers are designed and fabricated. Sharing the same etching profile as that of the CMOS poly-silicon gate layer, the fabrication of the grating couplers |
| 学科主题 | Engineering; Optics; Physics |
| 收录类别 | 2012SCI-050 |
| 原文出处 | 10.1109/LPT.2012.2210703 |
| 语种 | 英语 |
| 公开日期 | 2013-04-17 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/114816]  |
| 专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
| 推荐引用方式 GB/T 7714 | Qiu, C,Sheng, Z,Li, L,et al. Poly-Silicon Grating Couplers for Efficient Coupling With Optical Fibers[J]. IEEE PHOTONICS TECHNOLOGY LETTERS,2012,24(18):1614-1617. |
| APA | Qiu, C.,Sheng, Z.,Li, L.,Pang, A.,Wang, ZQ.,...&Gan, FW.(2012).Poly-Silicon Grating Couplers for Efficient Coupling With Optical Fibers.IEEE PHOTONICS TECHNOLOGY LETTERS,24(18),1614-1617. |
| MLA | Qiu, C,et al."Poly-Silicon Grating Couplers for Efficient Coupling With Optical Fibers".IEEE PHOTONICS TECHNOLOGY LETTERS 24.18(2012):1614-1617. |
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