Scaling properties of phase-change line memory
文献类型:期刊论文
作者 | Du, XF ; Song, SN ; Song, ZT ; Liu, WL ; Lu, SL ; Gu, YF ; Xue, WJ ; Xi, W |
刊名 | CHINESE PHYSICS B
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出版日期 | 2012 |
卷号 | 21期号:9页码:98401 |
关键词 | phase-change memory line structure scaling properties three-dimensional simulation |
ISSN号 | 1674-1056 |
通讯作者 | Du, XF (reprint author), Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Lab Nanotechnol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China. |
中文摘要 | Phase-change line memory cells with different line widths are fabricated using focused-ion-beam deposited C-Pt as a hard mask. The electrical performance of these memory devices was characterized. The current voltage (I-V) and resistance voltage (R V) cha |
学科主题 | Physics |
收录类别 | 2012SCI-057 |
原文出处 | 10.1088/1674-1056/21/9/098401 |
语种 | 英语 |
公开日期 | 2013-04-17 |
源URL | [http://ir.sim.ac.cn/handle/331004/114825] ![]() |
专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
推荐引用方式 GB/T 7714 | Du, XF,Song, SN,Song, ZT,et al. Scaling properties of phase-change line memory[J]. CHINESE PHYSICS B,2012,21(9):98401. |
APA | Du, XF.,Song, SN.,Song, ZT.,Liu, WL.,Lu, SL.,...&Xi, W.(2012).Scaling properties of phase-change line memory.CHINESE PHYSICS B,21(9),98401. |
MLA | Du, XF,et al."Scaling properties of phase-change line memory".CHINESE PHYSICS B 21.9(2012):98401. |
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