Active roles of helium in the growth of hydrogenated microcrystalline silicon germanium thin films
文献类型：期刊论文
| 作者 | Zhang, LP ; Zhang, JJ ; Zhang, X ; Cao, Y ; Zhao, Y |
| 刊名 | THIN SOLID FILMS
 |
| 出版日期 | 2012 |
| 卷号 | 520期号:18页码:5940-5945 |
| 关键词 | Helium dilution mu c-SiGe:H Atomic H Excitation transfer effect Optical emission spectroscopy |
| ISSN号 | 0040-6090 |
| 通讯作者 | Zhang, JJ (reprint author), Nankai Univ, Inst Photoelect Thin Film Devices & Tech, 94 Weijin Rd, Tianjin 300071, Peoples R China. |
| 中文摘要 | A combination of hydrogen and helium dilutions was introduced when the microcrystalline silicon germanium (mu c-SiGe:H) thin films were prepared by very high frequency plasma enhanced chemical vapor deposition on a low-temperature substrate. An optimum he |
| 学科主题 | Materials Science; Physics |
| 收录类别 | 2012SCI-095 |
| 原文出处 | 10.1016/j.tsf.2012.05.017 |
| 语种 | 英语 |
| 公开日期 | 2013-04-24 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/114952]  |
| 专题 | 上海微系统与信息技术研究所_新能源技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhang, LP,Zhang, JJ,Zhang, X,et al. Active roles of helium in the growth of hydrogenated microcrystalline silicon germanium thin films[J]. THIN SOLID FILMS,2012,520(18):5940-5945. |
| APA | Zhang, LP,Zhang, JJ,Zhang, X,Cao, Y,&Zhao, Y.(2012).Active roles of helium in the growth of hydrogenated microcrystalline silicon germanium thin films.THIN SOLID FILMS,520(18),5940-5945. |
| MLA | Zhang, LP,et al."Active roles of helium in the growth of hydrogenated microcrystalline silicon germanium thin films".THIN SOLID FILMS 520.18(2012):5940-5945. |
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