Simulation demonstration and experimental fabrication of a multiple-slot waveguide
文献类型：期刊论文
| 作者 | Tu, XG ; Xu, XJ ; Chen, SW ; Yu, JZ ; Wang, QM |
| 刊名 | ieee photonics technology letters
 |
| 出版日期 | 2008 |
| 卷号 | 20期号:39941页码:333-335 |
| 关键词 | dielectric waveguides silicon-on-insulator technology |
| ISSN号 | 1041-1135 |
| 通讯作者 | tu, xg, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china. 电子邮箱地址: tuxiaog@red.semi.ac.cn |
| 中文摘要 | a multiple-slot waveguide is presented and demonstrated through theoretical simulation. taking a double-slot waveguide as an example, the results show a nearly 30% enhancement of optical intensity compared with the traditional single-slot waveguide with the same slot gap width. therefore, the e-field intensity of the slot can be increased by adding another smaller slot. a double-slot waveguide with oxide and air as low index slot materials is realized experimentally and the formation processes of the slots are analyzed. |
| 学科主题 | 微电子学 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-03-08 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/6548]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Tu, XG,Xu, XJ,Chen, SW,et al. Simulation demonstration and experimental fabrication of a multiple-slot waveguide[J]. ieee photonics technology letters,2008,20(39941):333-335. |
| APA | Tu, XG,Xu, XJ,Chen, SW,Yu, JZ,&Wang, QM.(2008).Simulation demonstration and experimental fabrication of a multiple-slot waveguide.ieee photonics technology letters,20(39941),333-335. |
| MLA | Tu, XG,et al."Simulation demonstration and experimental fabrication of a multiple-slot waveguide".ieee photonics technology letters 20.39941(2008):333-335. |
入库方式： OAI收割
来源：半导体研究所
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