The influence of 1 nm AlN interlayer on properties of the Al0.3Ga0.7N/AlN/GaN HEMT structure
文献类型：期刊论文
| 作者 | Guo, LC ; Wang, XL ; Wang, CM ; Mao, HL ; Ran, JX ; Luo, WJ ; Wang, XY ; Wang, BZ ; Fang, CB ; Hu, GX |
| 刊名 | microelectronics journal
 |
| 出版日期 | 2008 |
| 卷号 | 39期号:5页码:777-781 |
| 关键词 | GaN HEMT 2DEG mobility polarization |
| ISSN号 | 0026-2692 |
| 通讯作者 | guo, lc, chinese acad sci, inst semicond, novel mat lab, beijing 100083, peoples r china. 电子邮箱地址: lcguo@semi.ac.cn |
| 中文摘要 | the sheet carrier concentrations, conduction band profiles and amount of free carriers in the barriers have been determined by solving coupled schrodinger and poisson equation self-consistently for coherently grown al0.3ga0.7n/gan and al0.3ga0.7n/aln/gan structures on thick gan. the al0.3ga0.7n/gan heterojunction structures with and without 1 nm aln interlayer have been grown by mocvd on sapphire substrate, the physical properties for these two structures have been investigated by various instruments such as hall measurement and x-ray diffraction. by comparison of the theoretical and experimental results, we demonstrate that the sheet carrier concentration and the electrons mobility would be improved by the introduction of an aln interlayer for al0.3ga0.7n/gan structure. mechanisms for the increasing of the sheet carrier concentration and the electrons mobility will be discussed in this paper. (c) 2007 elsevier ltd. all rights reserved. |
| 学科主题 | 半导体材料 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-03-08 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/6626]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Guo, LC,Wang, XL,Wang, CM,et al. The influence of 1 nm AlN interlayer on properties of the Al0.3Ga0.7N/AlN/GaN HEMT structure[J]. microelectronics journal,2008,39(5):777-781. |
| APA | Guo, LC.,Wang, XL.,Wang, CM.,Mao, HL.,Ran, JX.,...&Hu, GX.(2008).The influence of 1 nm AlN interlayer on properties of the Al0.3Ga0.7N/AlN/GaN HEMT structure.microelectronics journal,39(5),777-781. |
| MLA | Guo, LC,et al."The influence of 1 nm AlN interlayer on properties of the Al0.3Ga0.7N/AlN/GaN HEMT structure".microelectronics journal 39.5(2008):777-781. |
入库方式： OAI收割
来源：半导体研究所
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