Oxygen pressure dependences of structure and properties of ZnO films deposited on amorphous glass substrates by pulsed laser deposition
文献类型：期刊论文
| 作者 | Zhu, BL ; Zhao, XZ ; Xu, S ; Su, FH ; Li, GH ; Wu, XG ; Wu, J ; Wu, R ; Liu, J |
| 刊名 | japanese journal of applied physics
 |
| 出版日期 | 2008 |
| 卷号 | 47期号:4页码:2225-2229 part 1 |
| 关键词 | laser ablation zinc oxide deposition process optical properties electrical properties and measurements |
| ISSN号 | 0021-4922 |
| 通讯作者 | zhu, bl, wuhan univ sci & technol, key lab hubei province ceram, wuhan 430081, peoples r china. 电子邮箱地址: zhubailin97@hotmail.com |
| 中文摘要 | zno films are prepared on glass substrates by pulsed laser deposition (pld) at different oxygen pressures, and the effects of oxygen pressure on the structure and optoelectrical properties of as-grown zno films are investigated. the results show that the crystallite size and surface roughness of the films increase, but the carrier concentration and optical energy gap e-g decrease with increasing oxygen pressure. only uv emission is found in the photoluminescence (pl) spectra of all the samples, and its intensity increases with oxygen pressure. furthermore, there are marked differences in structure and properties between the films grown at low oxygen pressures (0.003 and 0.2 pa) and the films grown at high oxygen pressures (24 and 150 pa), which is confirmed by the fact that the crystallite size and uv emission intensity markedly increase, but the carrier concentration markedly decreases as oxygen pressure increases from 0.2 to 24 pa. these results show that the crystal quality, including the microstructural quality and stoichiometry proportion, of the prepared zno films improves as oxygen pressure increases, particularly from 0.2 to 24 pa. |
| 学科主题 | 半导体物理 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-03-08 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/6708]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Zhu, BL,Zhao, XZ,Xu, S,et al. Oxygen pressure dependences of structure and properties of ZnO films deposited on amorphous glass substrates by pulsed laser deposition[J]. japanese journal of applied physics,2008,47(4):2225-2229 part 1. |
| APA | Zhu, BL.,Zhao, XZ.,Xu, S.,Su, FH.,Li, GH.,...&Liu, J.(2008).Oxygen pressure dependences of structure and properties of ZnO films deposited on amorphous glass substrates by pulsed laser deposition.japanese journal of applied physics,47(4),2225-2229 part 1. |
| MLA | Zhu, BL,et al."Oxygen pressure dependences of structure and properties of ZnO films deposited on amorphous glass substrates by pulsed laser deposition".japanese journal of applied physics 47.4(2008):2225-2229 part 1. |
入库方式： OAI收割
来源：半导体研究所
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