Fabrication and optical optimization of spot-size converters with strong cladding layers
文献类型：期刊论文
| 作者 | Li Y
|
| 刊名 | journal of optics a-pure and applied optics
 |
| 出版日期 | 2009 |
| 卷号 | 11期号:8页码:art. no. 085002 |
| 关键词 | silicon-on-insulator (SOI) spot-size converters |
| ISSN号 | 1464-4258 |
| 通讯作者 | liu y chinese acad sci inst semicond state key lab integrated optoelect pob 912 beijing 100083 peoples r china. e-mail address: liuyan@semi.ac.cn |
| 中文摘要 | a silicon-on-insulator (soi) optical fiber-to-waveguide spot-size converter (ssc) overlaid with specially treated silica is investigated for integrated optical circuits. unlike the conventional process of simply depositing the hot silica on silicon waveguides, two successive layers of silicon dioxide were grown on etched ssc structures by pecvd (plasma-enhanced chemical vapor deposition). the two layers have 0.8% index contrast and supply stronger cladding for an incident light beam. additionally, this process is able to reduce the effective refractive index of the input mode to less than 1.47 (extremely close to that of the fiber), substantially weakening the unwanted back reflection. exploiting this technology, it was demonstrated that the ssc showed a theoretical low mode mismatch loss of 1.23 db for a te-like mode and has an experimental coupling efficiency of 66%. |
| 学科主题 | 光电子学 |
| 收录类别 | SCI |
| 资助信息 | state key development program 2006cb302803 2007cb613405 state high technology research and development program of china 2006aa03z424 national natural science foundation of china 60577044 this work is supported by the state key development program for basic research of china (grant nos 2006cb302803 and 2007cb613405) the state high technology research and development program of china (grant no. 2006aa03z424) and the national natural science foundation of china (grant no. 60577044). |
| 语种 | 英语 |
| 公开日期 | 2010-03-08 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/7033]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Li Y. Fabrication and optical optimization of spot-size converters with strong cladding layers[J]. journal of optics a-pure and applied optics,2009,11(8):art. no. 085002. |
| APA | Li Y.(2009).Fabrication and optical optimization of spot-size converters with strong cladding layers.journal of optics a-pure and applied optics,11(8),art. no. 085002. |
| MLA | Li Y."Fabrication and optical optimization of spot-size converters with strong cladding layers".journal of optics a-pure and applied optics 11.8(2009):art. no. 085002. |
入库方式： OAI收割
来源：半导体研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。