Surface characteristics of SiO2-TiO2 strip fabricated by laser direct writing
文献类型：期刊论文
| 作者 | Li AK ; Wang ZM ; Liu JJ ; Zeng XY ; Wang CX ; Chen HD |
| 刊名 | chinese optics letters
 |
| 出版日期 | 2008 |
| 卷号 | 6期号:2页码:108-111 |
| ISSN号 | 1671-7694 |
| 关键词 | OPTICAL WAVE-GUIDES SOL-GEL METHOD FEMTOSECOND LASER FILMS COMPOSITE |
| 通讯作者 | li ak huazhong univ sci & technol wuhan natl lab optoelect wuhan 430074 peoples r china. e-mail address: liaikui@163.com |
| 中文摘要 | sio2-tio2 sol-gel films are deposited on sio2/si by dip-coating technique. the sio2-tio2 strips are fabricated by laser direct writing using all ytterbium fiber laser and followed by chemical etching. surface structures, morphologies and roughness of the films and strips are characterized. the experimental results demonstrate that the sio2-tio2 sol-gel film is loose in structure and a shrinkage concave groove forms if the film is irradiated by laser beam. the surface roughness of both non-irradiated and laser irradiated areas increases with the chemical etching time. but the roughness of laser irradiated area increases more than that of non-irradiated area under the same etching time. after being etched for 28 s, the surface roughness value of the laser irradiated area increases from 0.3 nm to 3.1 nm. |
| 学科主题 | 光电子学 |
| 资助信息 | hi-tech research and development program of china 2005aa311030 this work was supported by the hi-tech research and development program of china under grant no. 2005aa311030. the authors would like to thank dr. x. jin for his work on characterization of the sol-gel films in experiments. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-03-08 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/7145]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Li AK,Wang ZM,Liu JJ,et al. Surface characteristics of SiO2-TiO2 strip fabricated by laser direct writing[J]. chinese optics letters,2008,6(2):108-111. |
| APA | Li AK,Wang ZM,Liu JJ,Zeng XY,Wang CX,&Chen HD.(2008).Surface characteristics of SiO2-TiO2 strip fabricated by laser direct writing.chinese optics letters,6(2),108-111. |
| MLA | Li AK,et al."Surface characteristics of SiO2-TiO2 strip fabricated by laser direct writing".chinese optics letters 6.2(2008):108-111. |
入库方式： OAI收割
来源：半导体研究所
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