中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Zero biased Ge-on-Si photodetector with a bandwidth of 4.72 GHz at 1550 nm

文献类型:期刊论文

作者Xue CL
刊名chinese physics b
出版日期2009
卷号18期号:6页码:2542-2544
ISSN号1674-1056
关键词Si-based Ge epitaxy photodetector
通讯作者xue hy chinese acad sci inst semicond state key lab integrated optoelect beijing 100083 peoples r china. e-mail address: cbw@semi.ac.cn
中文摘要high quality ge was epitaxially grown on si using ultrahigh vacuum/chemical vapor deposition (uhv/cvd). this paper demonstrates efficient germanium-on-silicon p-i-n photodetectors with 0.8 mu m ge, with responsivities as high as 0.38 and 0.21 a/w at 1.31 and 1.55 mu m, respectively. the dark current density is 0.37 ma/cm(2) and 29.4 ma/cm(2) at 0 v and a reverse bias of 0.5 v. the detector with a diameter of 30 mu m, a 3 db-bandwidth of 4.72 ghz at an incident wavelength of 1550 nm and zero external bias has been measured. at a reverse bias of 3 v, the bandwidth is 6.28 ghz.
学科主题光电子学
资助信息national high-technology research and development program of china 2006aa03z415 major state basic program of china 2007cb613404 national natural science foundation of china 60676005 project supported by the national high-technology research and development program of china (grant no 2006aa03z415), the major state basic program of china (grant no 2007cb613404), and the national natural science foundation of china (grant no 60676005).
收录类别SCI
语种英语
公开日期2010-03-08
源URL[http://ir.semi.ac.cn/handle/172111/7179]  
专题半导体研究所_中国科学院半导体研究所(2009年前)
推荐引用方式
GB/T 7714
Xue CL. Zero biased Ge-on-Si photodetector with a bandwidth of 4.72 GHz at 1550 nm[J]. chinese physics b,2009,18(6):2542-2544.
APA Xue CL.(2009).Zero biased Ge-on-Si photodetector with a bandwidth of 4.72 GHz at 1550 nm.chinese physics b,18(6),2542-2544.
MLA Xue CL."Zero biased Ge-on-Si photodetector with a bandwidth of 4.72 GHz at 1550 nm".chinese physics b 18.6(2009):2542-2544.

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来源:半导体研究所

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