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Growth-Parameter Spaces and Optical Properties of Cubic Boron Nitride Films on Si(001)
文献类型：期刊论文
| 作者 | You JB ; Zhang XW; Fan YM; Tan HR
|
| 刊名 | chinese physics letters
 |
| 出版日期 | 2009 |
| 卷号 | 26期号:5页码:art. no. 056801 |
| 关键词 | BN THIN-FILMS REFRACTIVE-INDEX ELLIPSOMETRY NUCLEATION DIAMOND DENSITY |
| ISSN号 | 0256-307x |
| 通讯作者 | zhang xw chinese acad sci inst semicond key lab semicond mat sci beijing 100083 peoples r china. e-mail address: xwzhang@semi.ac.cn |
| 中文摘要 | cubic boron nitride (c-bn) films were deposited on si(001) substrates in an ion beam assisted deposition (ibad) system under various conditions, and the growth parameter spaces and optical properties of c-bn films have been investigated systematically. the results indicate that suitable ion bombardment is necessary for the growth of c-bn films, and a well defined parameter space can be established by using the p/a-parameter. the refractive index of bn films keeps a constant of 1.8 for the c-bn content lower than 50%, while for c-bn films with higher cubic phase the refractive index increases with the c-bn content from 1.8 at chi(c) = 50% to 2.1 at chi(c) = 90%. furthermore, the relationship between n and rho for bn films can be described by the anderson-schreiber equation, and the overlap field parameter gamma is determined to be 2.05. |
| 学科主题 | 半导体材料 |
| 收录类别 | SCI |
| 资助信息 | national natural science foundation of china 50601025 supported by the national natural science foundation of china under grant no 50601025. |
| 语种 | 英语 |
| 公开日期 | 2010-03-08 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/7213]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | You JB,Zhang XW,Fan YM,et al. Growth-Parameter Spaces and Optical Properties of Cubic Boron Nitride Films on Si(001)[J]. chinese physics letters,2009,26(5):art. no. 056801. |
| APA | You JB,Zhang XW,Fan YM,&Tan HR.(2009).Growth-Parameter Spaces and Optical Properties of Cubic Boron Nitride Films on Si(001).chinese physics letters,26(5),art. no. 056801. |
| MLA | You JB,et al."Growth-Parameter Spaces and Optical Properties of Cubic Boron Nitride Films on Si(001)".chinese physics letters 26.5(2009):art. no. 056801. |
入库方式： OAI收割
来源：半导体研究所
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