Fiber Bragg grating pressure sensor with ultrahigh sensitivity and reduced temperature sensitivity
文献类型：期刊论文
| 作者 | Zhang WT
|
| 刊名 | optical engineering
 |
| 出版日期 | 2009 |
| 卷号 | 48期号:2页码:art. no. 024402 |
| 关键词 | pressure sensor fiber Bragg grating diaphragm |
| ISSN号 | 0091-3286 |
| 通讯作者 | zhang wt chinese acad sci inst semicond optoelect syst lab pob 912 beijing 100083 peoples r china. e-mail address: zhangwt@semi.ac.cn |
| 中文摘要 | a fiber bragg grating (fbg) pressure sensing scheme based on a flat diaphragm and an l-shaped lever is presented. an l-shaped lever transfers the pressure-induced defection of the flat diaphragm to the axial elongation of the fbg. the curve where the l-shaped lever contacts the diaphragm is a segment of an archimedes spiral, which is used to enhance the responsivity. because the thermal expansion coefficient of the quartz-glass l-shaped lever and the steel sensor shell is different, the temperature effect is compensated for by optimizing the dimension parameters. theoretical analysis is presented, and the experimental results show that an ultrahigh pressure responsivity of 244 pm/kpa and a low temperature responsivity of 2.8 pm/degrees c are achieved. (c) 2009 society of photo-optical instrumentation engineers. [doi 10.1117/1.3081058] |
| 学科主题 | 光电子学 |
| 收录类别 | SCI |
| 资助信息 | chinese academy of sciences cxjj-177 this work was supported by the key projects program of the chinese academy of sciences under grant number cxjj-177. |
| 语种 | 英语 |
| 公开日期 | 2010-03-08 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/7299]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Zhang WT. Fiber Bragg grating pressure sensor with ultrahigh sensitivity and reduced temperature sensitivity[J]. optical engineering,2009,48(2):art. no. 024402. |
| APA | Zhang WT.(2009).Fiber Bragg grating pressure sensor with ultrahigh sensitivity and reduced temperature sensitivity.optical engineering,48(2),art. no. 024402. |
| MLA | Zhang WT."Fiber Bragg grating pressure sensor with ultrahigh sensitivity and reduced temperature sensitivity".optical engineering 48.2(2009):art. no. 024402. |
入库方式： OAI收割
来源：半导体研究所
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