Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab
文献类型：期刊论文
| 作者 | Yu HJ ; Yu JZ ; Yu YD ; Chen SW |
| 刊名 | journal of nanoscience and nanotechnology
 |
| 出版日期 | 2009 |
| 卷号 | 9期号:2页码:974-977 |
| 关键词 | Photonic Crystal (PC) Channel-Drop Filter Silicon-on-Insulator (SOI) |
| ISSN号 | 1533-4880 |
| 通讯作者 | yu hj beijing univ posts & telecommun minist educ key lab opt commun & lightwave technol beijing 100876 peoples r china. |
| 中文摘要 | we report on the design and fabrication of a photonic crystal (pc) channel drop filter based on an asymmetric silicon-on-insulator (soi) slab. the filter is composed of two symmetric stick-shape micro-cavities between two single-line-defect (w1) waveguides in a triangular lattice, and the phase matching condition for the filter to improve the drop efficiency is satisfied by modifying the positions and radii of the air holes around the micro-cavities. a sample is then fabricated by using electron beam lithography (ebl) and inductively coupled plasma (icp) etching processes. the measured 0 factor of the filter is about 1140, and the drop efficiency is estimated to be 73% +/- 5% by fitting the transmission spectrum. |
| 学科主题 | 半导体化学 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-03-08 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/7327]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Yu HJ,Yu JZ,Yu YD,et al. Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab[J]. journal of nanoscience and nanotechnology,2009,9(2):974-977. |
| APA | Yu HJ,Yu JZ,Yu YD,&Chen SW.(2009).Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab.journal of nanoscience and nanotechnology,9(2),974-977. |
| MLA | Yu HJ,et al."Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab".journal of nanoscience and nanotechnology 9.2(2009):974-977. |
入库方式： OAI收割
来源：半导体研究所
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