Influence of implantation energy on the characteristics of Mn-implanted nonpolar a-plane GaN films
文献类型：期刊论文
| 作者 | Sun LL ; Yan FW ; Wang JX ; Zhang HX ; Zeng YP ; Wang GH ; Li JM |
| 刊名 | materials letters
 |
| 出版日期 | 2009 |
| 卷号 | 63期号:3-4页码:451-453 |
| 关键词 | Diluted magnetic semiconductors (DMSs) Implantation energy Nonpolar a-plane GaN:Mn films Room temperature |
| ISSN号 | 0167-577x |
| 通讯作者 | sun ll chinese acad sci inst semicond semicond lighting technol res & dev ctr beijing 100083 peoples r china. e-mail address: lilisun@semi.ac.cn |
| 中文摘要 | nonpolar gan mn films have been fabricated by implanting mn-ion into nonpolar a-plane (mo) gan films at room temperature. the influence of implantation energy on the structural, morphological and magnetic characteristics of samples have been investigated by means of stopping and range of ions in matter (srim) simulation software, high-resolution x-ray diffraction (hrxrd), atomic force microscopy (afm), and superconducting quantum interference device (squid). according to the squid analysis, obvious room temperature ferromagnetic properties of samples were detected. moreover, the implantation energy has little impact on the ferromagnetic properties of samples. the xrd and afm analyses show that the structural and morphological characteristics of samples were severely deteriorated with the increase of implantation energy. (c) 2008 elsevier b.v. all rights reserved. |
| 学科主题 | 半导体材料 |
| 收录类别 | SCI |
| 资助信息 | natural science foundation of china 60k6068 srf for rocs 08y1010000 this work was supported by the natural science foundation of china (grant no. 60k6068), and "the project-sponsored by srf for rocs (08y1010000), sem". |
| 语种 | 英语 |
| 公开日期 | 2010-03-08 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/7415]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Sun LL,Yan FW,Wang JX,et al. Influence of implantation energy on the characteristics of Mn-implanted nonpolar a-plane GaN films[J]. materials letters,2009,63(3-4):451-453. |
| APA | Sun LL.,Yan FW.,Wang JX.,Zhang HX.,Zeng YP.,...&Li JM.(2009).Influence of implantation energy on the characteristics of Mn-implanted nonpolar a-plane GaN films.materials letters,63(3-4),451-453. |
| MLA | Sun LL,et al."Influence of implantation energy on the characteristics of Mn-implanted nonpolar a-plane GaN films".materials letters 63.3-4(2009):451-453. |
入库方式： OAI收割
来源：半导体研究所
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