Fabrication of low-cost and high-reflectivity bottom mirrors for Si-based micro-cavity devices
文献类型：期刊论文
| 作者 | Li CB ; Li HX ; Mao RW ; Zuo YH ; Shi WH ; Zhao L ; Luo LP ; Cheng BW ; Yu JZ ; Wang QM |
| 刊名 | electronics letters
 |
| 出版日期 | 2004 |
| 卷号 | 40期号:17页码:1079-1080 |
| 关键词 | BRAGG REFLECTORS |
| ISSN号 | 0013-5194 |
| 通讯作者 | li, cb, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china. |
| 中文摘要 | a novel and simple way to prepare high-reflectivity bottom mirrors for si-based micro-cavity devices is reported. the bottom mirror was deposited in the hole, which was etched from the backside of the sample by ethylenediamine-pyrocatechol-water solution with the buried sio, layer in the silicon-on-insulator substrate as the etching-stop layer. the high-reflectivity of the bottom mirror deposited in the hole and the narrow hill width at half maximum of the cavity formed by this method both indicate the successful preparation of the bottom mirror for si-based micro-cavity devices. |
| 学科主题 | 光电子学 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-03-09 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/7978]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Li CB,Li HX,Mao RW,et al. Fabrication of low-cost and high-reflectivity bottom mirrors for Si-based micro-cavity devices[J]. electronics letters,2004,40(17):1079-1080. |
| APA | Li CB.,Li HX.,Mao RW.,Zuo YH.,Shi WH.,...&Wang QM.(2004).Fabrication of low-cost and high-reflectivity bottom mirrors for Si-based micro-cavity devices.electronics letters,40(17),1079-1080. |
| MLA | Li CB,et al."Fabrication of low-cost and high-reflectivity bottom mirrors for Si-based micro-cavity devices".electronics letters 40.17(2004):1079-1080. |
入库方式： OAI收割
来源：半导体研究所
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