Thermo-optic variable optical attenuator with low power consumption fabricated on silicon-on-insulator by anisotropic chemical etching
文献类型：期刊论文
| 作者 | Xia, JS ; Yu, JZ ; Fan, ZC ; Wang, ZT ; Chen, SW |
| 刊名 | optical engineering
 |
| 出版日期 | 2004 |
| 卷号 | 43期号:4页码:789-790 |
| ISSN号 | 0091-3286 |
| 关键词 | variable optical attenuator |
| 通讯作者 | xia, js, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china. 电子邮箱地址: jsxia@red.semi.ac.cn |
| 中文摘要 | a thermo-optic mach-zehnder (mz) variable optical attenuator based on silicon waveguides with a large cross section was designed and fabricated on silicon-on-insulator (soi) wafer. multimode interferometers were used as power splitters and combiners in the mz structure. in order to achieve a smooth interface, anisotropic chemical etching of silicon was used to fabricate the waveguides. isolating grooves were introduced to reduce power consumption and device length. the device has a low power consumption of 210 mw and a response time of 50 mus. (c) 2004 society of photo-optical instrumentation engineers. |
| 学科主题 | 光电子学 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-03-09 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/8104]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Xia, JS,Yu, JZ,Fan, ZC,et al. Thermo-optic variable optical attenuator with low power consumption fabricated on silicon-on-insulator by anisotropic chemical etching[J]. optical engineering,2004,43(4):789-790. |
| APA | Xia, JS,Yu, JZ,Fan, ZC,Wang, ZT,&Chen, SW.(2004).Thermo-optic variable optical attenuator with low power consumption fabricated on silicon-on-insulator by anisotropic chemical etching.optical engineering,43(4),789-790. |
| MLA | Xia, JS,et al."Thermo-optic variable optical attenuator with low power consumption fabricated on silicon-on-insulator by anisotropic chemical etching".optical engineering 43.4(2004):789-790. |
入库方式： OAI收割
来源：半导体研究所
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