Low power 2 x 2 thermo-optic SOI waveguide switch fabricated by anisotropy chemical etching
文献类型：期刊论文
| 作者 | Xia JS ; Yu JZ ; Wang ZT ; Fan ZC ; Chen SW |
| 刊名 | optics communications
 |
| 出版日期 | 2004 |
| 卷号 | 232期号:1-6页码:223-228 |
| ISSN号 | 0030-4018 |
| 关键词 | optical switch |
| 通讯作者 | xia, js, chinese acad sci, inst semicond, state key lab integrated optoelect, hai dian,pob 912, beijing 100083, peoples r china. 电子邮箱地址: jsxia@red.semi.ac.cn |
| 中文摘要 | a 2 x 2 thermo-optic (to) mach-zehnder (mz) switch based on silicon waveguides with large cross section was designed and fabricated on silicon-on-insulator (soi) wafer. the multi-mode interferometers (mmi) were used as power splitter and combiner in mz structure. in order to get smooth interface, anisotropy chemical wet-etching of silicon was used to fabricate the waveguides instead of dry-etching. additional grooves were introduced to reduce power consumption. the device has a low switching power of 235 mw and a switching speed of 60 mus. (c) 2004 elsevier b.v. all rights reserved. |
| 学科主题 | 光电子学 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-03-09 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/8164]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Xia JS,Yu JZ,Wang ZT,et al. Low power 2 x 2 thermo-optic SOI waveguide switch fabricated by anisotropy chemical etching[J]. optics communications,2004,232(1-6):223-228. |
| APA | Xia JS,Yu JZ,Wang ZT,Fan ZC,&Chen SW.(2004).Low power 2 x 2 thermo-optic SOI waveguide switch fabricated by anisotropy chemical etching.optics communications,232(1-6),223-228. |
| MLA | Xia JS,et al."Low power 2 x 2 thermo-optic SOI waveguide switch fabricated by anisotropy chemical etching".optics communications 232.1-6(2004):223-228. |
入库方式： OAI收割
来源：半导体研究所
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