Influence of nitrogen annealing on electrical properties of lead zirconate titanate thin film deposited on titanium metal foil
文献类型：期刊论文
| 作者 | Zhang, GQ ; Zou, Q ; Sun, P ; Mei, X ; Ruda, HE |
| 刊名 | materials letters
 |
| 出版日期 | 2004 |
| 卷号 | 58期号:5页码:706-710 |
| 关键词 | ferroelectrics |
| ISSN号 | 0167-577x |
| 通讯作者 | zou, q, energenius inc, 351 steelcase rd w 3, markham, on, canada. 电子邮箱地址: qzou@energenius.com |
| 中文摘要 | we report on improved electrical properties of lead zirconate titanate (pzt) film deposited on titanium metal foil using nitrogen annealing. after nitrogen annealing of the pzt capacitors, symmetric capacitance-voltage (c-v) characteristics, higher dielectric constant and breakdown field, less change of dielectric constant with frequency, lower dielectric loss and leakage current are obtained. (c) 2003 elsevier b.v. all rights reserved. |
| 学科主题 | 半导体材料 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-03-09 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/8206]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Zhang, GQ,Zou, Q,Sun, P,et al. Influence of nitrogen annealing on electrical properties of lead zirconate titanate thin film deposited on titanium metal foil[J]. materials letters,2004,58(5):706-710. |
| APA | Zhang, GQ,Zou, Q,Sun, P,Mei, X,&Ruda, HE.(2004).Influence of nitrogen annealing on electrical properties of lead zirconate titanate thin film deposited on titanium metal foil.materials letters,58(5),706-710. |
| MLA | Zhang, GQ,et al."Influence of nitrogen annealing on electrical properties of lead zirconate titanate thin film deposited on titanium metal foil".materials letters 58.5(2004):706-710. |
入库方式： OAI收割
来源：半导体研究所
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