Growth of graphene-like thin films at low temperature by dual-frequency capacitively coupled plasma
文献类型：期刊论文
| 作者 | Xu, YJ ; Wu, XM ; Ye, C |
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 出版日期 | 2012 |
| 卷号 | 258期号:19页码:7751-7754 |
| ISSN号 | 0169-4332 |
| 关键词 | Chemistry Materials Science Physics Physics Physical Coatings & Films Applied Condensed Matter |
| 学科主题 | Chemistry; Materials Science; Physics |
| 收录类别 | SCI |
| 原文出处 | 10.1016/j.apsusc.2012.04.133 |
| 语种 | 英语 |
| 公开日期 | 2013-05-10 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/115217]  |
| 专题 | 上海微系统与信息技术研究所_信息功能材料国家重点实验室2008-2012_期刊论文 |
| 推荐引用方式 GB/T 7714 | Xu, YJ,Wu, XM,Ye, C. Growth of graphene-like thin films at low temperature by dual-frequency capacitively coupled plasma[J]. APPLIED SURFACE SCIENCE,2012,258(19):7751-7754. |
| APA | Xu, YJ,Wu, XM,&Ye, C.(2012).Growth of graphene-like thin films at low temperature by dual-frequency capacitively coupled plasma.APPLIED SURFACE SCIENCE,258(19),7751-7754. |
| MLA | Xu, YJ,et al."Growth of graphene-like thin films at low temperature by dual-frequency capacitively coupled plasma".APPLIED SURFACE SCIENCE 258.19(2012):7751-7754. |
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