High speed 2x2 optical switch in silicon-on-insulator based on plasma dispersion effect
文献类型：期刊论文
| 作者 | Sun F ; Yu JZ ; Chen SW |
| 刊名 | chinese physics letters
 |
| 出版日期 | 2005 |
| 卷号 | 22期号:12页码:3097-3099 |
| 关键词 | WAVE-GUIDE SWITCH |
| ISSN号 | 0256-307x |
| 通讯作者 | sun, f, chinese acad sci, inst semicond, natl key lab integrated optoelect, beijing 100083, peoples r china. 电子邮箱地址: sun@red.semi.ac.cn |
| 中文摘要 | based on free carrier plasma dispersion effect, a 2 x 2 optical switch is fabricated in a silicon-on-insulator substrate by inductively coupled-plasma technology and ion implantation. the device has a mach-zehnder interferometer structure, in which two directional couplers serve as the power splitter and combiner. the switch presents an insertion loss of 3.04 db and a response time of 496 ns. |
| 学科主题 | 光电子学 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-03-17 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/8376]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Sun F,Yu JZ,Chen SW. High speed 2x2 optical switch in silicon-on-insulator based on plasma dispersion effect[J]. chinese physics letters,2005,22(12):3097-3099. |
| APA | Sun F,Yu JZ,&Chen SW.(2005).High speed 2x2 optical switch in silicon-on-insulator based on plasma dispersion effect.chinese physics letters,22(12),3097-3099. |
| MLA | Sun F,et al."High speed 2x2 optical switch in silicon-on-insulator based on plasma dispersion effect".chinese physics letters 22.12(2005):3097-3099. |
入库方式： OAI收割
来源：半导体研究所
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