Design and fabrication of compact nonblocking 4X4 optical matrix switch on silicon-on-insulator by anisotropic chemical etching
文献类型：期刊论文
| 作者 | Li ZY
|
| 刊名 | optical engineering
 |
| 出版日期 | 2005 |
| 卷号 | 44期号:7页码:art.no.070503 |
| 关键词 | optical matrix switch |
| ISSN号 | 0091-3286 |
| 通讯作者 | liu, jw, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china. 电子邮箱地址: jwliu@red.semi.ac.cn |
| 中文摘要 | a folding nonblocking 4 x 4 optical matrix switch in simplified-tree architecture was designed and fabricated on a silicon-on-insulator wafer. to compress chip size, switch elements (ses) were connected by total internal reflection mirrors instead of conventional s-bends. for obtaining smooth interfaces, potassium hydroxide (koh) anisotropic chemical etching of silicon was employed. the device has a compact size of 20 x 3.2 mm(2) and a fast response of 8 +/- 1 mu s. power consumption of 2 x 2 se and excess loss per mirror were 145 mw and -1.1 db, respectively. (c) 2005 society of photo-optical instrumentation engineers. |
| 学科主题 | 光电子学 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-03-17 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/8454]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Li ZY. Design and fabrication of compact nonblocking 4X4 optical matrix switch on silicon-on-insulator by anisotropic chemical etching[J]. optical engineering,2005,44(7):art.no.070503. |
| APA | Li ZY.(2005).Design and fabrication of compact nonblocking 4X4 optical matrix switch on silicon-on-insulator by anisotropic chemical etching.optical engineering,44(7),art.no.070503. |
| MLA | Li ZY."Design and fabrication of compact nonblocking 4X4 optical matrix switch on silicon-on-insulator by anisotropic chemical etching".optical engineering 44.7(2005):art.no.070503. |
入库方式： OAI收割
来源：半导体研究所
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