Effects of crystalline quality on the phase stability of cubic boron nitride thin films under medium-energy ion irradiation
文献类型：期刊论文
| 作者 | Zhang XW
|
| 刊名 | diamond and related materials
 |
| 出版日期 | 2005 |
| 卷号 | 14期号:9页码:1482-1488 |
| 关键词 | cubic boron nitride |
| ISSN号 | 0925-9635 |
| 通讯作者 | zhang, xw, inst semicond, key lab semicond mat sci, cas,pob 912, beijing 100083, peoples r china. 电子邮箱地址: xwzhang@red.semi.ac.cn |
| 中文摘要 | to investigate the effect of radiation damage on the stability and the compressive stress of cubic boron nitride (c-bn) thin films, c-bn films with various crystalline qualities prepared by dual beam ion assisted deposition were irradiated at room temperature with 300 kev ar+ ions over a large fluence range up to 2 x 10(16) cm(-2). fourier transform infrared spectroscopy (ftir) data were taken before and after each irradiation step. the results show that the c-bn films with high crystallinity are significantly more resistant against medium-energy bombardment than those of lower crystalline quality. however, even for pure c-bn films without any sp(2)-bonded bn, there is a mechanism present, which causes the transformation from pure c-bn to h-bn or to an amorphous bn phase. additional high resolution transmission electron microscopy (hrtem) results support the conclusion from the ftir data. for c-bn films with thickness smaller than the projected range of the bombarding ar ions, complete stress relaxation was found for ion fluences approaching 4 x 10(15) cm(-2). this relaxation is accompanied, however, by a significant increase of the width of c-bn ftir to-line. this observation points to a build-up of disorder and/or a decreasing average grain size due to the bombardment. (c) 2005 elsevier b.v. all rights reserved. |
| 学科主题 | 半导体材料 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-03-17 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/8616]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Zhang XW. Effects of crystalline quality on the phase stability of cubic boron nitride thin films under medium-energy ion irradiation[J]. diamond and related materials,2005,14(9):1482-1488. |
| APA | Zhang XW.(2005).Effects of crystalline quality on the phase stability of cubic boron nitride thin films under medium-energy ion irradiation.diamond and related materials,14(9),1482-1488. |
| MLA | Zhang XW."Effects of crystalline quality on the phase stability of cubic boron nitride thin films under medium-energy ion irradiation".diamond and related materials 14.9(2005):1482-1488. |
入库方式： OAI收割
来源：半导体研究所
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