Integrated folding 4x4 optical matrix switch with total internal reflection mirrors on SOI by anisotropic chemical etching
文献类型：期刊论文
| 作者 | Li ZY
|
| 刊名 | ieee photonics technology letters
 |
| 出版日期 | 2005 |
| 卷号 | 17期号:6页码:1187-1189 |
| 关键词 | optical switch |
| ISSN号 | 1041-1135 |
| 通讯作者 | liu, jw, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china. 电子邮箱地址: jwliu@red.semi.ac.cn ; jzyu@red.semi.ac.cn ; swchen@red.semi.ac.cn ; lizhy@red.semi.ac.cn |
| 中文摘要 | a folding rearrangeable nonblocking 4 x 4 optical matrix switch was designed and fabricated on silicon-on-insulator wafer. to compress chip size, switch elements (ses) were interconnected by total internal reflection (tir) mirrors instead of conventional s-bends. for obtaining smooth interfaces, potassium hydroxide anisotropic chemical etching of silicon was utilized to make the matrix switch for the first time. the device has a compact size of 20 x 1.6 mm(2) and a fast response of 7.5 mu s. the power consumption of each 2 x 2 se and the average excess loss per mirror were 145 mw and -1.1 db, respectively. low path dependence of +/- 0.7 db in total excess loss was obtained because of the symmetry of propagation paths in this novel matrix switch. |
| 学科主题 | 光电子学 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-03-17 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/8674]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Li ZY. Integrated folding 4x4 optical matrix switch with total internal reflection mirrors on SOI by anisotropic chemical etching[J]. ieee photonics technology letters,2005,17(6):1187-1189. |
| APA | Li ZY.(2005).Integrated folding 4x4 optical matrix switch with total internal reflection mirrors on SOI by anisotropic chemical etching.ieee photonics technology letters,17(6),1187-1189. |
| MLA | Li ZY."Integrated folding 4x4 optical matrix switch with total internal reflection mirrors on SOI by anisotropic chemical etching".ieee photonics technology letters 17.6(2005):1187-1189. |
入库方式： OAI收割
来源：半导体研究所
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