Thermo-optical switch matrix based on silicon-on-insulator waveguides
文献类型:期刊论文
作者 | Li YP ; Yang D ; Sun F ; Chen SW ; Yu JZ |
刊名 | chinese physics letters |
出版日期 | 2005 |
卷号 | 22期号:3页码:621-623 |
ISSN号 | 0256-307x |
关键词 | FABRICATION |
通讯作者 | li, yp, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china. 电子邮箱地址: liyp@red.semi.ac.cn |
中文摘要 | a thermo-optical waveguide switch matrix is designed and fabricated on silicon-on-insulator wafer. multi-mode interferometers are used as power splitters and combiners in a mach-zehnder structure. inductively coupled plasma reactive ion etching is used to fabricate the waveguides. the rise and fall times of the switch matrix are 13 mu s and 7 mu s, respectively. switch cells have an average switching power consumption of 340 mw. |
学科主题 | 光电子学 |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2010-03-17 |
源URL | [http://ir.semi.ac.cn/handle/172111/8752] |
专题 | 半导体研究所_中国科学院半导体研究所(2009年前) |
推荐引用方式 GB/T 7714 | Li YP,Yang D,Sun F,et al. Thermo-optical switch matrix based on silicon-on-insulator waveguides[J]. chinese physics letters,2005,22(3):621-623. |
APA | Li YP,Yang D,Sun F,Chen SW,&Yu JZ.(2005).Thermo-optical switch matrix based on silicon-on-insulator waveguides.chinese physics letters,22(3),621-623. |
MLA | Li YP,et al."Thermo-optical switch matrix based on silicon-on-insulator waveguides".chinese physics letters 22.3(2005):621-623. |
入库方式: OAI收割
来源:半导体研究所
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