Effect of the variation of temperature on the structural and optical properties of ZnO thin films prepared on Si (111) substrates using PLD
文献类型：期刊论文
| 作者 | Wang, ZY ; Hu, LZ ; Zhao, J ; Sun, J ; Wang, ZJ |
| 刊名 | vacuum
 |
| 出版日期 | 2005 |
| 卷号 | 78期号:1页码:53-57 |
| 关键词 | ZnO thin films |
| ISSN号 | 0042-207x |
| 通讯作者 | wang, zy, dalian univ technol, dept phys, state key lab mat modificat laser ion electron be, dalian 116024, peoples r china. 电子邮箱地址: wangzhy@student.dlut.edu.cn |
| 中文摘要 | zno thin films were prepared on si (1 11) substrates at various temperatures from 250 to 700 degrees c using pulsed laser deposition (pld) technique in order to investigate the structural and optical properties of the films. the structural and morphological properties of the films were investigated by xrd and sem measurements, respectively. the quality of the films was improved with the increase of the temperature. by xrd patterns the fwhms of the (0 0 2) peaks of the zno films became narrower when the temperatures were above 500 degrees c. the fwhms of the peaks of (0 0 2) of the films were as narrow as about 0. 19 degrees when films were grown at 650 and 700 degrees c. this indicates the superior crystallinity of the films. the optical properties of the films were studied by photoluminescence spectra using a 325 nm he-cd laser. the two strongest uv peaks were found at 377.9 nm from zno films grown at 650 and 700 degrees c. this result is consistent with that of the xrd investigation. broad bands in visible region from 450 to 550 nm were also observed. our works suggest that uv emissions have close relations with not only the crystallinity but also the stoichiometry of the zno films. (c) 2005 elsevier ltd. all rights reserved. |
| 学科主题 | 半导体材料 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-03-17 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/8822]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Wang, ZY,Hu, LZ,Zhao, J,et al. Effect of the variation of temperature on the structural and optical properties of ZnO thin films prepared on Si (111) substrates using PLD[J]. vacuum,2005,78(1):53-57. |
| APA | Wang, ZY,Hu, LZ,Zhao, J,Sun, J,&Wang, ZJ.(2005).Effect of the variation of temperature on the structural and optical properties of ZnO thin films prepared on Si (111) substrates using PLD.vacuum,78(1),53-57. |
| MLA | Wang, ZY,et al."Effect of the variation of temperature on the structural and optical properties of ZnO thin films prepared on Si (111) substrates using PLD".vacuum 78.1(2005):53-57. |
入库方式： OAI收割
来源：半导体研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。