Fabrication and analysis of 2x2 thermo-optic SOI waveguide switch with low power consumption and fast response by anisotropy chemical etching
文献类型：期刊论文
| 作者 | Liu JW ; Yu JZ ; Chen SW ; Xia JS |
| 刊名 | optics communications
 |
| 出版日期 | 2005 |
| 卷号 | 245期号:1-6页码:137-144 |
| ISSN号 | 0030-4018 |
| 关键词 | thermo-optic switch |
| 通讯作者 | liu, jw, chinese acad sci, inst semicond, state key lab integrated optoelect, pob 912, beijing 100083, peoples r china. 电子邮箱地址: jwliu@red.semi.ac.cn |
| 中文摘要 | a low power consumption 2 x 2 thermo-optic switch with fast response was fabricated on silicon-on-insulator by anisotropy chemical etching. blocking trenches were etched on both sides of the phase-shifting arms to shorten device length and reduce power consumption. thin top cladding layer was grown to reduce power consumption and switching time. the device showed good characteristics, including a low switching power of 145 mw and a fast switching speed of 8 +/- 1 mus, respectively. two-dimensional finite element method was applied to simulate temperature field in the phase-shifting arm instead of conventional one-dimensional method. according to the simulated result, a new two-dimensional index distribution of phase-shifting arm was determined. consequently finite-difference beam propagation method was employed to simulate the light propagation in the switch, and calculate the power consumption as well as the switching speed. the experimental results were in good agreement with the theoretical estimations. (c) 2004 elsevier b.v. all rights reserved. |
| 学科主题 | 光电子学 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-03-17 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/8878]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Liu JW,Yu JZ,Chen SW,et al. Fabrication and analysis of 2x2 thermo-optic SOI waveguide switch with low power consumption and fast response by anisotropy chemical etching[J]. optics communications,2005,245(1-6):137-144. |
| APA | Liu JW,Yu JZ,Chen SW,&Xia JS.(2005).Fabrication and analysis of 2x2 thermo-optic SOI waveguide switch with low power consumption and fast response by anisotropy chemical etching.optics communications,245(1-6),137-144. |
| MLA | Liu JW,et al."Fabrication and analysis of 2x2 thermo-optic SOI waveguide switch with low power consumption and fast response by anisotropy chemical etching".optics communications 245.1-6(2005):137-144. |
入库方式： OAI收割
来源：半导体研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。