Novel folding large-scale optical switch matrix with total internal reflection mirrors on silicon-on-insulator by anisotropy chemical etching
文献类型：期刊论文
| 作者 | Liu JW ; Yu JZ ; Chen SW |
| 刊名 | chinese physics letters
 |
| 出版日期 | 2005 |
| 卷号 | 22期号:1页码:142-145 |
| 关键词 | RIB WAVE-GUIDES |
| ISSN号 | 0256-307x |
| 通讯作者 | liu, jw, chinese acad sci, inst semicond, state key lab integrated optoelect, pob 912, beijing 100083, peoples r china. 电子邮箱地址: jwliu@red.semi.ac.cn |
| 中文摘要 | a compact optical switch matrix was designed, in which light circuits were folded by total internal reflective (tir) mirrors. two key elements, 2 x 2 switch and tir mirror, have been fabricated on silicon-on-insulator wafer by anisotropy chemical etching. the 2 x 2 switch showed very low power consumption of 140 mw and a very high speed of 8 +/- 1 mus. an improved design for the tir mirror was developed, and the fabricated mirror with smooth and vertical reflective facet showed low excess loss of 0.7 +/- 0.3 db at 1.55 mum. |
| 学科主题 | 光电子学 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-03-17 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/8898]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Liu JW,Yu JZ,Chen SW. Novel folding large-scale optical switch matrix with total internal reflection mirrors on silicon-on-insulator by anisotropy chemical etching[J]. chinese physics letters,2005,22(1):142-145. |
| APA | Liu JW,Yu JZ,&Chen SW.(2005).Novel folding large-scale optical switch matrix with total internal reflection mirrors on silicon-on-insulator by anisotropy chemical etching.chinese physics letters,22(1),142-145. |
| MLA | Liu JW,et al."Novel folding large-scale optical switch matrix with total internal reflection mirrors on silicon-on-insulator by anisotropy chemical etching".chinese physics letters 22.1(2005):142-145. |
入库方式： OAI收割
来源：半导体研究所
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